Akihiro Matsutani

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 3:30 PM A302 (A302)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.1 Interdisciplinary and General Physics

[20p-A302-1~9] 1.1 Interdisciplinary and General Physics

2:00 PM - 2:15 PM

[20p-A302-5] Measurement of Frequency Response of Viola using a V-shaped Pendulum

〇Akihiro Matsutani¹ (1.Tokyo Tech)

Tue. Sep 20, 2022 9:30 AM - 11:30 AM P01 (Arena)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[20a-P01-1~5] 1.3 Novel technologies and interdisciplinary engineering

9:30 AM - 11:30 AM

[20a-P01-5] Microfabrication of Ge by SF₆-RIE using SML1000 EB Resist Mask

〇Akihiro Matsutani¹, Mie Tohnishi¹, Miho Fujimoto¹, Sachiko Matsushita² (1.OFC, Tokyo Tech, 2.Mater.Sci.Eng. Tokyo Tech)