Ryunosuke Masunaga

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

3:15 PM - 3:30 PM

[20p-A105-6] Development of array-shaped RF magnetron sputtering source based on a combination of race-track and segment magnetron plasmas for uniform target utilization

〇(M1)Ryunosuke Masunaga¹, Yasunori Ohtsu¹ (1.Saga Univ.)