Shota Kato

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

3:45 PM - 4:00 PM

[20p-A105-7] Investigation of the reflection spectrum to enhance in-situ measurements of deposited film thickness and electron density with double curling probes

〇(M1)Shota Kato¹, Keiji Nakamura¹, Daisuke Ogawa¹ (1.Chubu Univ.)