Kento Sakane

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

△ [21a-A406-4] A study of crystallization process in Ge/Si stacked layer

〇(M2)Kento Sakane¹, Hajime Noaki¹, Yuichiro Mitani¹ (1.Tokyo City Univ)