Koki Nozawa

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:15 AM

[21a-A406-8] Effects of n-type impurity doping in solid-phase crystallization of Ge thin films

〇Koki Nozawa¹, Takeshi Nishida^1,2, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of. Tsukuba, 2.JSPS Research Fellow)