Shinya Imai

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:00 PM C202 (C202)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[21a-C202-1~12] 17.3 Layered materials

11:30 AM - 11:45 AM

[21a-C202-11] Research on sputter deposition rate dependence of MoS₂ film quality

〇Shinya Imai¹, Ryo Ono¹, Iriya Muneta¹, Kuniyuki Kakushima¹, Tetsuya Tatsumi¹, Shigetaka Tomiya¹, Kazuo Tsutsui¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech.)