Shunsuke Kobayashi

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:45 AM C306 (C306)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21a-C306-1~10] 7.2 Applications and technologies of electron beams

10:00 AM - 10:15 AM

[21a-C306-5] Deposition of hafnium oxide by electron beam induced deposition method

〇Shunsuke Kobayashi¹ (1.JFCC)