Tomoaki Osumi

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 2:45 PM C306 (C306)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21p-C306-1~5] 7.2 Applications and technologies of electron beams

1:30 PM - 1:45 PM

[21p-C306-1] Dependence of work function of hafnium nitride thin films by reactive sputtering on nitrogen composition

〇Tomoaki Osumi^1,2, Masayoshi Nagao², Yasuhito Gotoh¹ (1.Kyoto Univ., 2.AIST)