Kazuto Mizutani

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 4:00 PM - 6:00 PM P15 (Arena)

Poster presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[21p-P15-1~6] 6.1 Ferroelectric thin films

4:00 PM - 6:00 PM

[21p-P15-1] Reliability improvement of Y:HfO₂ capacitors by rare-earth oxides capping

〇Kazuto Mizutani¹, Takuya Hoshii¹, Takamasa Kawanago², Iriya Muneta¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech School of Eng., 2.Tokyo Tech FIRST)