Jiawen Yu

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 12:00 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[22a-B204-1~11] 13.7 Compound and power devices, process technology and characterization

11:30 AM - 11:45 AM

△ [22a-B204-10] Development of a Real-Time Temperature Measurement Technique based on Optical-Interference Contactless Thermometry (OICT) for SiC wafer during Rapid Thermal Processing

〇Jiawen Yu¹, Kotaro Matsuguchi¹, Takuma Sato¹, Hiroaki Hanafusa¹, Seiichirou Higashi¹ (1.Hiroshima Univ.)