Yukimura Tokita

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:30 PM - 6:00 PM A307 (A307)

Oral presentation
| CS Code-sharing session
| 【CS.7】 Code-sharing Session of 6.1 & 13.3 & 13.5

[22p-A307-1~17] CS.7 Code-sharing Session of 6.1 & 13.3 & 13.5

3:00 PM - 3:15 PM

[22p-A307-7] Influence of sputtering pressure on AlScN films

〇(B)Yukimura Tokita¹, Sung-Lin Tsai¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech Eng., 2.Tokyo Tech IIR)