Masakazu Tanuma

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:30 PM - 6:00 PM A307 (A307)

Oral presentation
| CS Code-sharing session
| 【CS.7】 Code-sharing Session of 6.1 & 13.3 & 13.5

[22p-A307-1~17] CS.7 Code-sharing Session of 6.1 & 13.3 & 13.5

3:30 PM - 3:45 PM

[22p-A307-8] Investigation of the decrease of interfacial layer thickness for the ferroelectric nondoped HfO₂ formation and device characteristics of MFSFET

〇Masakazu Tanuma¹, Joong-Won Shin¹, Shun-ichiro Ohmi¹ (1.Tokyo Inst. of Technology)