Keisuke Matsuura

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:30 PM - 6:00 PM C105 (C105)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.6 Ultrasonics

[22p-C105-1~17] 1.6 Ultrasonics

4:00 PM - 4:15 PM

△ [22p-C105-10] Deposition at Low Rates and Evaluation of Ta₂O₅ Piezoelectric Thin Film on SRO/Pt/Si Substrate

〇(M2)Keisuke Matsuura¹, Masashi Suzuki¹, Shoji Kakio¹, Masanori Kodera², Hiroshi Funakubo² (1.Univ. of Yamanashi, 2.Tokyo Institute of Technology)