Kohdai Sakuta

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.3 & 7.5

[22p-C205-1~15] CS.1 Code-sharing Session of 2.3 & 7.5

4:00 PM - 4:15 PM

[22p-C205-10] Etching of Ni pattern by O₂-GCIB and acac adsorption

〇Kohdai Sakuta¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.Hyogo Univ.)