〇Toshio Seki¹, Hiroki Yamamoto², Kunihiko Koike³, Takaaki Aoki⁴, Jiro Matsuo¹ (1.Grad. Sch. of Eng., Kyoto Univ., 2.QST, 3.Iwatani Corp., 4.Nagoya Univ.)

5:00 PM - 5:15 PM

[22p-C205-13] Effects of Spray Voltage on Sputtered Volumes Produced by Vaccuum Electrospray Droplet Ion Beams

〇Seinosuke Tsuneki¹ (1.Yamanashi Univ.)

5:15 PM - 5:30 PM

△ [22p-C205-14] Low-temperature growth of Au nanowires by thermal evaporation of Au on a substrate with sputter-deposited Si

〇Hitomi Mizutani¹, Shunya Yamamoto², Katsumi Takahiro¹ (1.Kyoto Inst. Tech., 2.QST Takasaki)

5:30 PM - 5:45 PM

[22p-C205-15] Lowering in density of Ag nanoparticle aggregates by ion irradiation

〇(M1)Kengo Watanabe¹, Hitomi Mizutani¹, Katsumi Takahiro¹ (1.Kyoto Inst. Tech.)

Session information

[22p-C205-1~15] CS.1 Code-sharing Session of 2.3 & 7.5

[22p-C205-1] Development of TOF-ERDA system for Lithium-ion battery analysis(Ⅱ)

△ [22p-C205-2] Secondary electron emission from self-supporting graphene films by swift ion beam irradiation

[22p-C205-3] Analysis of infra-track reaction in the interaction between the ion beam and liquid water using PHITS

[22p-C205-4] Effect of non-aromatic matrix on the ionization of polymer molecules with cluster ion beam irradiation

[22p-C205-5] Analysis of energy-dependent SIMS spectral data of benzylpyridinium

[22p-C205-6] [Young Scientist Presentation Award Speech] GCIB etching process for low damage and atomic layer control of silicon nitride film

[22p-C205-7] Investigation of low damage irradiation effect by GCIB irradiation on silicon nitride film

[22p-C205-8] Bonding condition of surface activated bonding by gas cluster ion beam irradiation in acetic acid atmosphere

[22p-C205-9] Precise figuring using location specific processing of GCIB-ALE

[22p-C205-10] Etching of Ni pattern by O₂-GCIB and acac adsorption

[22p-C205-11] Atomic layer Etching of metal films by neutral cluster beam irradiation

[22p-C205-12] GaN etching with reactive gas cluster injection

[22p-C205-13] Effects of Spray Voltage on Sputtered Volumes Produced by Vaccuum Electrospray Droplet Ion Beams

△ [22p-C205-14] Low-temperature growth of Au nanowires by thermal evaporation of Au on a substrate with sputter-deposited Si

[22p-C205-15] Lowering in density of Ag nanoparticle aggregates by ion irradiation

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