Masaya Takeuchi

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.3 & 7.5

[22p-C205-1~15] CS.1 Code-sharing Session of 2.3 & 7.5

3:00 PM - 3:15 PM

[22p-C205-6] [Young Scientist Presentation Award Speech] GCIB etching process for low damage and atomic layer control of silicon nitride film

〇Masaya Takeuchi¹, Reki Fujiwara¹, Noriaki Toyoda¹ (1.Univ. of Hyogo)