Kohshi Taguchi

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:00 AM - 9:15 AM

[23a-B101-1] Relation between flip-flop characteristics of PTFE sputtered film and OH group

〇Kohshi Taguchi¹, Mina Tomikawa¹, Ko Minoura¹, Motohiro Yamahara¹, Kazuyuki Noborio¹ (1.SAKIGAKE-Semiconductor Co., Ltd.)

9:15 AM - 9:30 AM

[23a-B101-2] Plasma polymers are affected by chemical structure of monohydric alcohols.

〇Kohshi Taguchi¹, Kashiwagi Daiki¹, Yamahara Motohiro¹, Noborio Kazuyuki¹ (1.SAKIGAKE-Semiconductor Co., Ltd.)