Teruya Yamada

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:30 PM - 3:45 PM B102 (B102)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[23p-B102-1~8] 8.3 Plasma nanotechnology

1:45 PM - 2:00 PM

[23p-B102-2] Deposition of RF sputtered Si / C composite films and their application to high-capacity Li ion battery anodes

〇Teruya Yamada¹, Misao Kiga¹, Ryo Hanai¹, Kodai Masumoto¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene.Inst.Meijo Univ.)