The 83rd JSAP Autumn Meeting 2022

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Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

[23p-B102-1~8] 8.3 Plasma nanotechnology

Fri. Sep 23, 2022 1:30 PM - 3:45 PM B102 (B102)

Takeshi Kitajima(National Defence Academy), Tsuyohito Ito(Univ. of Tokyo)

1:45 PM - 2:00 PM

[23p-B102-2] Deposition of RF sputtered Si / C composite films and their application to high-capacity Li ion battery anodes

〇Teruya Yamada1, Misao Kiga1, Ryo Hanai1, Kodai Masumoto1, Giichiro Uchida1,2 (1.Meijo Univ., 2.Ene.Inst.Meijo Univ.)

Keywords:sputtering, Li ion Battery