Shinji Yamada

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:30 PM - 3:45 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[23p-B204-1~9] 13.7 Compound and power devices, process technology and characterization

1:45 PM - 2:00 PM

[23p-B204-2] Electrical characteristics of Ge-doped GaN films deposited by low-temperature sputtering on N-polar surfaces

〇Shinji Yamada¹, Masanori Shirai², Hiroki Kobayashi², Ryuichiro Kamimura², Manabu Arai¹, Tetsu Kachi¹, Jun Suda¹ (1.Nagoya Univ., 2.ULVAC)