Nonoka Niwa

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:30 PM - 3:45 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[23p-B204-1~9] 13.7 Compound and power devices, process technology and characterization

2:00 PM - 2:15 PM

[23p-B204-3] Investigation of Multi-Photon Excitation PEC Etching for n-type GaN with Different Carrier Concentrations

〇Nonoka Niwa¹, Seiya Kawasaki¹, Takeru Kumabe¹, Hirotaka Watanabe², Yuta Furusawa², Atsushi Tanaka², Manato Deki³, Maki Kushimoto¹, Shugo Nitta², Yoshio Honda², Hiroshi Amano^2,3,4 (1.Dept. of Electronics, Nagoya Univ., 2.IMaSS Nagoya Univ., 3.VBL Nagoya Univ., 4.ARC Nagoya Univ.)

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