Takanori Asano

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

1:15 PM - 1:30 PM

[23p-C102-1] Nanoscale distribution of subgap excitations in β-Si₃N₄ observed by valence EELS using low-voltage monochromated STEM

〇Takanori Asano¹, Manabu Tezura¹, Masumi Saitoh¹, Hiroki Tanaka¹, Jun Kikkawa², Koji Kimoto² (1.Kioxia, 2.NIMS)