Akari Kekke

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

3:45 PM - 4:00 PM

[23p-C102-10] Investigation of PMA metal species effective for improving GeO2 film quality and
GeO2/Ge interface properties

〇Akari Kekke¹, Kota Kanno¹, Kugo Matsuura¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)