Investigation of PMA metal species effective for improving GeO2 film quality and<br />GeO2/Ge interface properties

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo)

3:45 PM - 4:00 PM

〇Akari Kekke¹, Kota Kanno¹, Kugo Matsuura¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)

Keywords:semiconductor