Takahiro Ishihara

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 1:30 PM - 4:30 PM C200 (C200)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[23p-C200-1~11] 15.4 III-V-group nitride crystals

3:30 PM - 3:45 PM

△ [23p-C200-8] Hydrogen Iodide (HI) Neutral Beam Etching for InGaN/GaN Micro-LED

〇(M2)Takahiro Ishihara¹, Ohori Daisuke¹, Xuelun Wang^3,4, Kazuhiko Endo³, Natori Nobuhiro⁵, Tanimoto Yousuke⁵, Yiming Li⁶, Seiji Samukawa^6,1,2 (1.IFS, Tohoku Univ., 2.AIMR, Tohoku Univ., 3.AIST., 4.IMaSS, Nagoya Univ., 5.Showa Denko K.K., 6.NYCU)

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