Noriyuki Uchida

→ Search for Noriyuki Uchida in Google Scholar

Chairperson, etc.

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Keisuke Yamamoto(Kyushu Univ.), Noriyuki Uchida(AIST)

Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)

Symposium (Oral)
| Symposium
| Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

Hitoshi Wakabayashi(Tokyo Tech), Noriyuki Uchida(AIST)