[20a-P06-1~11] 12.7 Biomedical Engineering and Biochips

▲ [20a-P06-9] Geometric optimization of Pt catalyst array for the sensitivity enhancement of SnO₂-based gas sensor

〇Ang Li¹, Xuesi Li¹, Reo Kometani¹, Ichiro Yamada², Makiko Noma², Katsufumi Nakanishi², Yusuke Fukuda², Kazuyuki Sashida², Toshiyuki Takemori², Kenichi Maehara², Katsuya Ikeda², Kenichi Yoshida², Yoshio Mita¹, Shin'ichi Warisawa¹ (1.Univ. of Tokyo, 2.Shindengen Co., Ltd.)

Keywords:MOx gas sensor, numerical model, spillover

Detecting acetone in human breath has been proposed as a non-invasive method of diabetes diagnosis. Metal oxide semiconductor type gas sensors have been shown by previous works to be promising for breath diagnosis. This work investigated a relationship between the sensitivity and a platinum array on SnO₂ thin film to figure out its optimized structure. A numerical model was derived to interpret the sensitivity enhancement mechanism based on oxygen spillover effect, and to give predictions of higher performance sensor structures.