Measurement of spatial distribution of hydrogen atom above SUS stage in inductively coupled remote H<sub>2</sub> plasma with vacuum ultraviolet absorption spectroscopy

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Daisuke Ogawa(Chubu Univ.), Kentaro Tomita(Hokkaido Univ.)

2:30 PM - 2:45 PM

〇(M2)Kazushi Masuda¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1.Meijo Univ.)

Keywords:vacuum ultraviolet absorption spectroscopy, spatial distribution of hydrogen atom density, surface reaction