Spatial distribution of RF ring shaped hollow magnetized plasma with two facing cylindrical AZO targets and preparation of AZO thin film

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Daisuke Ogawa(Chubu Univ.), Kentaro Tomita(Hokkaido Univ.)

3:00 PM - 3:15 PM

〇Shoma Imoto¹, Yasunori Ohtsu¹ (1.Saga Univ.)

Keywords:AZO thin film, two facing cylindrical AZO targets

抵抗率の分布を均一化できる対向ターゲットスパッタに着目し，対向円筒型 AZOターゲットを用いた高周波リング状ホロー磁化プラズマの空間分布を計測し、AZO薄膜合成を目的とした．