[21a-A102-1~7] 9.3 Nanoelectronics

[21a-A102-6] Hydrogen sensor fabricated using a platinum/titanium oxide nanocontact

〇Yasuhisa Naitoh¹, Sumiya Touru¹, Shima Hisashi¹, Akinaga Hiroyuki¹ (1.AIST)

Keywords:hydrogen sensor, nanogap, titanium oxide

Hydrogen is one of the main energy sources for decarbonization, and hydrogen sensors are necessary for safe management. For example, sensors combining metal oxides and catalytic metals have been actively studied. They have achieved high performance by introducing nanostructures. In this study, we investigated the nanostructured junction of Pt and TiOx to improve the performance of hydrogen sensors.