SiGe film growth via pulsed laser annealing of Al-Ge alloyed pastes on Si

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Kaoru Toko(Univ. of Tsukuba), Junji Yamanaka(Univ. of Yamanashi)

9:00 AM - 9:15 AM

〇Takeshi Sato¹, Satoru Miyamoto¹, Shota Suzuki^2,3, Marwan Dhamrin^2,3, Noritaka Usami¹ (1.Nagoya Univ., 2.Toyo Aluminium K.K., 3.Osaka Univ.)

Keywords:Pulsed laser annealing, Silicon-Germanium