The 83rd JSAP Autumn Meeting 2022

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21a-C206-1~13] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Wed. Sep 21, 2022 9:00 AM - 12:30 PM C206 (C206)

Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.)

10:15 AM - 10:30 AM

[21a-C206-6] Study on Crystallization of a-Si thin films formed on ultrathin SiO2 by RTA Process

〇(D)Yuki Imai1, Katsunori Makihara1, Noriyuki Taoka1, Akio Ohta1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:crystalline silicon, Silicon-on-insulator