[21a-P01-1~16] 6.2 Carbon-based thin films

▲ [21a-P01-3] Air damping effect on the quality factor of single-crystal diamond MEMS resonators

Yinling Chen^1,2, Liwen Sang¹, Yasuo Koide¹, Koizumi Satoshi¹, Xiaoxi Liu², 〇Meiyong Liao¹ (1.National Institute for Material Science, 2.Shinshu University)

Keywords:Diamond, MEMS

In this work, we aim to understand the pressure dependent energy loss behavior of the SCD-on-SCD MEMS cantilevers by measuring the Q factors at different vacuum pressures to atmosphere pressure. The SCD microcantilevers were fabricated by the ion-implantation assisted lift-off technique or the smart-cut method. The cantilever length is from 30 to 160 µm, the width is 10 and 12 µm, the thickness is around 1 µm. The Q factors of the SCD cantilevers were obtained by measuring the resonance spectra of the cantilevers, which are the ratio of the resonator frequency to its bandwidth when subjected to an oscillating driving force. The resonance frequency spectra were measured by a laser doppler velocimetry in a vacuum chamber with a base pressure less than 10^-3 Pa. An air leakage valve was used to control the pressure in the measurement chamber up to the atmosphere pressure. The Q-factor gradually decreases from around 10 000 in for the vacuum at ~ 10^-3Pa to less than 100 in air pressure. The pressure dependent Q factor is consistent with those reported for Si cantilevers.