The 83rd JSAP Autumn Meeting 2022

Presentation information

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[21p-A106-1~18] 15.5 Group IV crystals and alloys

Wed. Sep 21, 2022 1:00 PM - 5:45 PM A106 (A106)

Kaoru Toko(Univ. of Tsukuba), Ryo Matsumura(National Institute for Materials Science (NIMS))

2:00 PM - 2:15 PM

[21p-A106-5] Influences of mesa-etching depth on crack propagation in strained SiGe on Ge(111)

Youya Wagatsuma1, Rena Kanesawa1, Alam Md. Mahfuz1,2, Kazuya Okada1, Takahiro Inoue1, Michihiro Yamada3, Kohei Hamaya3,4, Kentarou Sawano1 (1.Tokyo City Univ., 2.Univ. of Barishal, 3.CSRN, Osaka Univ., 4.OTRI, Osaka Univ.)

Keywords:SiGe, crack