The 83rd JSAP Autumn Meeting 2022

Presentation information

Symposium (Oral)

Symposium » Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)

Hitoshi Wakabayashi(Tokyo Tech), Noriyuki Uchida(AIST)

1:30 PM - 1:40 PM

[21p-B104-1] The importance of green strategies in the semiconductor industry is discussed.

Kazuya Masu1 (1.Tokyo Tech)

Keywords:green innovation, semiconductor

Semiconductor industry in Green Innovation Era