The 83rd JSAP Autumn Meeting 2022

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Symposium (Oral)

Symposium » Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)

Hitoshi Wakabayashi(Tokyo Tech), Noriyuki Uchida(AIST)

4:15 PM - 4:45 PM

[21p-B104-7] Possibility of greener LSIs by pn-stacked gate-all-around (GAA) 2D-FETs

〇Hitoshi Wakabayashi1 (1.Tokyo Tech)

Keywords:2D FET, Greener

Possibility of greener LSIs by pn-stacked gate-all-around (GAA) 2D-FETs is going to be discussed.