The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[22a-A202-1~9] 6.2 Carbon-based thin films

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

Yasuharu Ohgoe(Tokyo Denki Univ.)

11:15 AM - 11:30 AM

[22a-A202-9] Effect of input power density on deposition of diamond-like carbon film by high power pulsed magnetron sputtering

〇Takayuki Ohta1, Jo Matsushima1, Akinori Oda2, Hiroyuki Kousaka3 (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:amorphous carbon, sputtering