[22a-P04-1~14] 8 Plasma Electronics(Poster)

[22a-P04-5] Analysis of Droplet-Vaporization Behavior in Plasma for Formation of 3D Nanostructured Zinc Oxide Thin Films by Plasma-assisted Mist CVD

〇Kosuke Takenaka¹, Susumu Toko¹, Yuichi Setsuhara¹ (1.Osaka Univ.)

Keywords:ZnO, Mist CVD