[22a-P04-1~14] 8 Plasma Electronics(Poster)

[22a-P04-9] Gas-sensing Properties of SnO₂ Thin Films Prepared by Glancing-angle Sputtering

〇Yuma Kameda¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)

Keywords:Sputtering method, SnO2, Glancing-angle deposition

SnO₂ has been utilized as a gas-sensing material. In this study, microstructured SnO2 films were fabricated by glancing-angle sputtering. The SnO₂ films had a dense columnar structure. The SnO₂ films exhibited a 51 % fall of resistyvity in maximum after an exposure to an ethanol vapor.