[22p-A202-1~22] 6.2 Carbon-based thin films

[22p-A202-2] Water-repellent hydrogen-free DLC by four targets facing sputtering method.

〇Futa Kobayashi¹, Tetsuya Saruwatari¹ (1.Keihin Ramtech)

Keywords:hydrogen-free DLC, water repellent, four targets facing sputtering

The purpose of this project is to form hydrogen-free DLC with water repellency and high hardness using a four-sided opposed sputtering cathode (RAM cathode) developed by the company. The contact angle of conventional hydrogen-free DLC is 65~75°, while that of hydrogen-containing DLC is 75~90°. Contact angle measurements yielded 83.1°. Ra:0.88nm was obtained for smoothness. It is expected that the water repellency is improved by the smoothness. It is possible to form hydrogen-free DLC with water repellency equal to or better than that of hydrogen-containing DLC.