The 83rd JSAP Autumn Meeting 2022

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[22p-C200-1~15] 15.4 III-V-group nitride crystals

Thu. Sep 22, 2022 1:30 PM - 6:00 PM C200 (C200)

Motoaki Iwaya(Meijo Univ.), Yoshio Honda(Nagoya Univ.), Maki Kushimoto(Nagoya Univ.)

5:45 PM - 6:00 PM

△ [22p-C200-15] Reduction of dislocation density in AlGaN fabricated on periodic AlN nanopillars

〇Ryota Hasegawa1, Ayumu Yabutani1, Ryosuke Kondo1, Eri Matsubara1, Sho Iwayama1,2, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Hideto Miyake2 (1.Meijo Univ., 2.Mie Univ.)

Keywords:semiconductor, dislocation density