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△ [23a-B101-5] TiN Film Formed by DC-Filtered Arc Deposition with Anode Acting as Droplet Filter
Keywords:filtered arc deposition, titanium nitride films, vacuum arc deposition
In this study, we developed a bent filtered arc deposition system that uses a bent coil as an anode and generates a filter magnetic field by DC arc current itself. For comparison, a linear filtered arc deposition system with a cylindrical anode was used. Titanium nitride films were produced using both systems. The plasma beams of both systems were observed and the number of droplets on the surface of the thin films were compared. The experimental results showed that this apparatus can generate a magnetic field by the arc current itself, transport the plasma beam, and filter droplets significantly.