2022年第83回応用物理学会秋季学術講演会

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13 半導体 » 13.2 探索的材料物性・基礎物性

[23a-C101-1~12] 13.2 探索的材料物性・基礎物性

2022年9月23日(金) 09:00 〜 12:15 C101 (C101)

鵜殿 治彦(茨城大)、立岡 浩一(静大)

09:30 〜 09:45

[23a-C101-3] Synthesis of Fe-silicides from Fe and CaSi2 powders in NaCl molten salt

Jilani Ansari1、Fumio Komeda1、Yosuke Shimura1,2、〇Hirokazu Tatsuoka1 (1.Grad. Sch. Integr. Sci. & Technol. Shizuoka Univ.、2.RIE, Shizuoka Univ.)

キーワード:silicide semiconductor

b-FeSi2 has attracted attention for its potential as a thermoelectric and an optoelectronic material. b-FeSi2 layers were grown on FeSi substrates by molten salt technique using NaCl–NaF–Na2SiF6 and Si powder. In the case, Si atoms diffused into FeSi substrates to form b-FeSi2. Recently, metal-chlorides were used to synthesize Si- and silicide-nanosheet bundles using CaSi2 crystal as a template. The molten salt technique using metal-chlorides provides several advantages for developing structural properties of the nanosheets, by introducing a variety of compound nanosheet synthesis and surface modification. However, the Fe-silicide formation was not observed using FeCl2, and Fe-silicide formation process has not been understood yet. In this study, the formation of Fe-silicides was examined by molten salt technique using NaCl with Fe and CaSi2 powders.