The 83rd JSAP Autumn Meeting 2022

Presentation information

Symposium (Oral)

Symposium » Innovation and application of measurement informatics

[23p-B200-1~5] Innovation and application of measurement informatics

Fri. Sep 23, 2022 1:00 PM - 5:00 PM B200 (B200)

Toyohiro Chikyo(NIMS), Shigetaka Tomiya(SONY Corp.)

4:15 PM - 5:00 PM

[23p-B200-5] Value and Expectations for Measurement Informatics from Semiconductor Industry

Kazuya Okamoto1 (1.Yamaguchi Univ.)

Keywords:Semiconductor, Metrology, Management of Technology

The market creation process of the electronics industry has changed from an S-shaped growth curve, and the importance of semiconductors, the central axis of the electronics industry, has been reaffirmed through the perspective of creating and capturing value from measurement technology. Measurement informatics, such as multimodal analysis based on AI data-driven analysis and the combination of different technologies for multifaceted measurement information, can break through the closed measurement industry. In addition, it is expected to be widely used from R&D to mass production for advanced semiconductors, where the integration and optimization of front-end and back-end processes and complex miniaturization coexist.