10:15 AM - 10:30 AM
[22a-D215-5] Multi-physics simulation of optical switch operation using a phase change material
Keywords:optical switch, phase change, GST
In order to fully understand the behavior of phase change optical switch, we have developed a multi-physics simulation system including a realistic phase change model. The process of controlling the GST (Ge2Sb2Te5) phase change by Joule heat generated from the ITO heater layer was investigated. It was found that during the quenching process to form an amorphous GST, recrystallization occurs in a part of the GST layer, which reduces the transmittance in the ON state of the optical switch.