The 69th JSAP Spring Meeting 2022

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Oral presentation

CS Code-sharing session » 【CS.9】 Code-sharing Session of 13.7 & 15.6

[22p-E302-1~15] CS.9 Code-sharing Session of 13.7 & 15.6

Tue. Mar 22, 2022 1:45 PM - 6:30 PM E302 (E302)

Yasunori Tanaka(AIST), Manabu Arai(Nagoya Univ.)

2:45 PM - 3:15 PM

[22p-E302-3] [The 43rd Best Review Paper Award Speech] Defect Engineering in SiC Technology for High-voltage Power Devices

〇Heiji Watanabe1, Tsunenobu Kimoto2 (1.Osaka Univ., 2.Kyoto Univ.)

Keywords:silicon carbide, power device, MOS device