Extremely Sensitive Ball SAW Hydrogen Sensor

Nobuo Takeda, Toru Oizumi, Hideyuki Fukushi, Kazushi Yamanaka, Maki Sugawara, Tomoki Tanaka, Tatsuhiro Okano, Akinobu Takeda, Shingo Akao, Yusuke Tsukahara, Takamitsu Iwaya, Toshihiro Tsuji

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[23p-D113-1~19] 1.6 Ultrasonics

Wed. Mar 23, 2022 1:00 PM - 6:15 PM D113 (D113)

Yuji Ohashi(Tohoku Univ.), Jun Kondoh(Shizuoka Univ.)

4:15 PM - 4:30 PM

[23p-D113-12] Extremely Sensitive Ball SAW Hydrogen Sensor

〇Nobuo Takeda¹, Toru Oizumi¹, Hideyuki Fukushi¹, Kazushi Yamanaka¹, Maki Sugawara¹, Tomoki Tanaka¹, Tatsuhiro Okano¹, Akinobu Takeda¹, Shingo Akao¹, Yusuke Tsukahara¹, Takamitsu Iwaya¹, Toshihiro Tsuji^2,1 (1.Ball Wave Inc., 2.Tohoku Univ.)

Keywords:Surface Acousic Wave, Hydrogen Sensor, Ball SAW device

A 6 ppbv detection limit of hydrogen was obtained by measuring delay time change of 80MHz / 240MHz double frequency driven ball SAW hydrogen sensor. It is the highest sensitivity among existing hydrogen sensors.