[23p-D113-1~19] 1.6 Ultrasonics

△ [23p-D113-15] Highly Stable Shear-Horizontal SAW on Ca₃TaGa₃Si₂O₁₄ Piezoelectric Single Crystal

〇Ryoto Suzuki¹, Masashi Suzuki¹, Shoji Kakio¹, Noritoshi Kimura² (1.Univ. of Yamanashi, 2.Piezo Studio Inc.)

Keywords:Ca3TaGa3Si2O14, shear-horizontal surface acoustic wave, zero temperature coefficient of frequency

In this paper, we report the results of experimental evaluation of the resonant properties including temperature properties of SH waves by fabricating Al-interdigital transducer on Ca₃TaGa₃Si₂O₁₄. As a result, the measured effective electromechanical coupling factor is about 50~60% of the simulated value, which is attributed to the reduction of the electrode finger width that contributes to energy trapping of SH wave in the vicinity of the surface . 46 ppm frequency change rate was obtained in the range of 20~80°C, which is a highly stable characteristic. In the future, we will investigate the condition of the apex temperature at room temperature.