The 69th JSAP Spring Meeting 2022

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13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[23p-E307-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Mar 23, 2022 1:30 PM - 7:00 PM E307 (E307)

Kazuhiko Endo(AIST), Masahiro Hori(静大)

6:00 PM - 6:15 PM

△ [23p-E307-17] Development of MOS Capacitance Evaluation Method at Cryogenic Temperature (4K)

〇(B)Tomohisa Miyao1, Takahisa Tanaka1, Ken Uchida1 (1.The Univ. of Tokyo)

Keywords:Cryo-CMOS, Carrier Freezeout, MOS Capacitance