The 69th JSAP Spring Meeting 2022

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[23p-P06-1~16] 6.4 Thin films and New materials

Wed. Mar 23, 2022 1:30 PM - 3:30 PM P06 (Poster)

1:30 PM - 3:30 PM

[23p-P06-3] Growth of ZnSnN2 layer by UHV sputter epitaxy method

〇Sotaro Mizuuchi1, Shogo Terashita1, Keisuke Yoshida1, Shinoda Hiroyuki1, Nobuki Mutsukura1 (1.Tokyo Denki Univ.)

Keywords:Suputter epitaxy, Zinc tin nitride, Ternary nitride